Recently, the official list of projects approved for Nanjing Major Science and Technology Special Program was released. The project “R&D and Industrialization of High-Reliability Integrated Edge Precision Machining and Intelligent Inspection Equipment for 12-inch Wafers” submitted by Jiangsu Flat Semiconductor Equipment Co., Ltd. (“Flat Semiconductor”), a direct-invested enterprise of Nanjing Venture Capital Group, has been successfully approved.

As an important platform for promoting breakthroughs in regional key core technologies and fostering new-quality productive forces, Nanjing Major Science and Technology Special Program focuses on the development needs of strategic emerging industries and supports innovative enterprises with core competitiveness to tackle bottleneck technologies.

The project approved by Flat Semiconductor aligns precisely with the special program’s core orientation of “localization of core components for high-end manufacturing equipment”. Targeting the long-term foreign technology monopoly in the field of precision edge processing for 12-inch wafers, the project will tackle key scientific issues including the development of ultra-precision mechanical platforms and multi-axis collaborative systems, integrated intelligent inspection and sensing systems, and the construction of intelligent process control and optimization engines.

The integrated edge precision machining and intelligent inspection equipment developed by the project will effectively support advanced processes of 5nm and below with higher precision and stability, breaking the technical barriers of foreign enterprises.

Founded in March 2019, Flat Semiconductor focuses on the domestic substitution of high-end wet-process equipment for semiconductors and pan-semiconductors. Its main products include single-wafer wet equipment, bath-type wet equipment, and MASKCLEAN equipment for Micro-OLED mass production. The company owns a number of China-initiated and globally pioneering technologies, with more than 100 patents and software copyrights in total. Its equipment technology is leading domestically, and some products have broken foreign monopolies.

Currently, the company is accelerating R&D, mass production and base expansion with financing support, committed to upgrading China’s semiconductor display equipment industry through scientific and technological innovation.

In April 2025, Nanjing Venture Capital Group, Xingang High-Tech Investment and Oriental Industry Finance jointly invested tens of millions of yuan in Flat Semiconductor.

A relevant person in charge from Investment Department V of Nanjing Venture Capital Group stated that Flat Semiconductor’s selection into Nanjing Major Science and Technology Special Program further demonstrates the team’s hardcore technical strength. Focusing on the localization of high-end equipment for 12-inch wafers, the company directly targets pain points of bottleneck technologies, and its technological breakthrough is of great significance.

The independent and controllable development of the semiconductor display industry chain is an inevitable trend. Nanjing Venture Capital Group is optimistic about the company’s development potential and expects it to continue focusing on technology and accelerate industrialization, injecting new momentum into the industry.

Source: Xu Shengwen, Investment Department V

Reviewed by: Xue Yao

Released by: You Yi